| 摘要 |
PURPOSE:To improve measurement precision by using a nonconductive thin plate for a base plate where electrodes are arranged and providing an air layer opposite a receiving electrode between the reverse surface of the base plate and a base plate fitting member. CONSTITUTION:Plural receiving electrodes 122 are arranged on the surface of the receiving electrode base plate 120 of the non-conductive thin plate opposite a transmitting electrode and a coupling electrode 124 which is coupled electrically with the electrode 122 is arranged below it. Further, the base plate fitting member 126 made of a conductive material is arranged on the reverse surface of the base plate 120. Then, the base plate 120 is made of a thin plate of epoxy resin which is formed to a half as thick as before and a cut part 128 is formed in the member 126 in nearly the same shape with the electrode opposite the electrode 122 to form the air layer. Thus, the electrode base plate is formed extremely thinly and stuck fixedly on the member 126 having excellent flatness to improve the flatness of the base plate, and the air layer is formed between the base plate 120 and member 126 at the position opposite the receiving electrode on the reverse surface of the base plate 120, so deterioration in precision due to the electrostatic capacitive coupling between the electrode and base plate fitting member.
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