| 摘要 |
PURPOSE:To obtain a jig having long life for pulling a single crystal comprising boron nitride having a specified roughness of the internal surface. CONSTITUTION:A mold comprising a material having high purity (e.g. graphite) with surface roughness (Rmax) being <=500mum, and high heat resistance and high corrosion resistance is disposed in a resistance heating vacuum furnace. A gaseous mixture consisting of boron halide and ammonia mixed in 1:1-4 molar ratio is fed to the furnace. Boron nitride is deposited by chemical vapor deposition to the inside surface of the mold by heating at 1,850-2,100 deg.C for 5-50hr under <=50Torr. The deposited boron nitride film is stripped off after cooling. Then, the inside surface is polished to obtain a jig having <=350mum internal surface roughness (Rmax) and 0.5-5mm thickness is obtd. for a jig for pulling a group II-VI and group III-V compound semiconductor. |
