| 摘要 |
PURPOSE:To make the exact measurement of a semiconductor element possible by providing electrodes on both sides of an insulator in such a manner that both electrodes contact simultaneously with the same electrode of the semiconductor element. CONSTITUTION:The electrodes 7 consisting of gold, etc. are adhered by plating, etc. to both sides of the insulator 6 consisting of ceramics, etc. and the electrodes 7 are brought into contact with the semiconductor element 9 formed on a wafer 8. A power source 10 for measuring resistance and an instrument 11 for measurement are connected to both electrodes 7 prior to the measurement of the characteristic of the element 9, then the resistance between the electrodes 7 is measured. The circuit is changed over to a circuit consisting of a power source 13 for measuring the semiconductor element and an instrument 14 for measurement by a relay 12 without moving the two electrodes 7 and the characteristic of the element 9 is measured. The voltage drop or current loss-component of the contact resistance between the electrodes 7 is subtracted from the measured characteristic value of the element 9, by which the true value is obtd. The exact measurement of the characteristic is thus made possible by measuring the resistance of the electrodes 7 and correcting the same at every measurement of the characteristic of the element 9.
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