发明名称 MANUFACTURE OF LEAD FRAME OF SEMICONDUCTOR DEVICE
摘要 PURPOSE:To readily form a lead frame without using an expensive manufacturing method such as etching even in case of the frame with many fingers by forming the frame with the fingers fundamentally by an electroforming. CONSTITUTION:A resist layer 9 of the desired pattern is formed on a substrate 8, and the shape of a nonresist portion 8a is formed in a lead frame shape of the desired pattern. A metal layer 10 is formed only on the nonresist portion 8a except the layer 9 by electroforming on the substrate 8, and pressed to bend to project at the metal layer side. Then, the layer 10 of a laminate is again electroformed, the second metal layer 11 is laminated, and a contact material 12 is further coated on the end 4d of the finger 4. When only the substrate 8 is eventually separated from the laminate, a lead frame 7 having the finger 4 is obtained. The end 4d of the obtained finger 4 is formed with a bump 4a having a thickness in the projecting direction, and suitable flexibility is applied by a thin erected portion 4c.
申请公布号 JPS61234060(A) 申请公布日期 1986.10.18
申请号 JP19850074299 申请日期 1985.04.10
申请人 KYUSHU HITACHI MAXELL LTD 发明人 SHIMAZU HIROSHI;YAMASHITA YASUO;SUZUKI MASAYOSHI;SAKATA EIJI
分类号 H01L23/50;H01L21/48;H01L23/48;H01L23/495 主分类号 H01L23/50
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