| 摘要 |
PURPOSE:To enable the thin film whose composition is expressed by FeaAlbGec and which has the soft magnetic characteristic of the same degree as Sendust alloy and the remarkably high saturated magnetic flux density by specifying a range of the above composition. CONSTITUTION:The composition is expressed by FeaAlbGec (wherein a.b. and c show the composition rate by atm%) and a range of this composition is range of formula. For example, Fe, Al and Ge are weighed so as to meet the predetermined composition rate and these are fused and cast by use of a high-frequency induction heating furnace. After that, by mechanical process, these are made into the alloy target for sputtering of 4 inches diameter and 4mm thickness. Sputtering is done by using this alloy target and a high-frequency magnetron sputtering device so that a thin film on a crystallized glass substrate is obtained. Furthermore, this thin film is annealed to be cooled gradually and a soft magnetic thin film is obtained. This can meet the enhancement of the coersive force of a magnetic recording medium sufficiently and it becomes possible to contrive the high quality and high recording density.
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