| 摘要 |
PURPOSE:To form easily a nonmagnetic insulating layer between magnetic layers by using an oxidized film obtained by vapor depositing the vapor deposition source identical to the material of the magnetic layer in an oxidizing atmosphere as the nonmagnetic insulating layer to reduce the effect of the strain between magnetic layers on the soft magnetic characteristic. CONSTITUTION:A soft magentic film of a nonmagnetic material, etc., is vapor- deposited on a substrate and a vapor deposition source identical to the nonmagentic material is vapor-deposited in an oxidizing atmosphere (contg. gaseous oxygen) as the interlayer material between the soft magnetic films. consequently, a non-magnetic metallic oxide-film insulating layer 2 contg. a magnetic element identical to the soft magnetic material is obtained. A laminated structure can be easily formed by repeating the lamination of the magnetic film 1 and the nonmagnetic film 2. Since the nonmagnetic insulating layer is composed of the magnetic metallic element identical to the magnetic layer, the consistency is improved and hence the effect of the strain between layers on the soft magnetic characteristic can be reduced.
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