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发明名称
METHOD AND DEVICE FOR CLEAVING CRYSTAL
摘要
申请公布号
JPS61233506(A)
申请公布日期
1986.10.17
申请号
JP19850074360
申请日期
1985.04.10
申请人
TOSHIBA CORP
发明人
KATO ICHIRO
分类号
B28D1/32;B28D5/00;H01L21/301;H01L21/78;H01S5/00
主分类号
B28D1/32
代理机构
代理人
主权项
地址
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