| 摘要 |
PURPOSE:To select the most suitable temp. characteristic of electrostatic capacity and to control the temp. characteristic of whole sensor by providing a temp. compensating terminal on an alumina base. CONSTITUTION:An alumina diaphragm 2 arranged so that a prescribed space is obtained with respect to the alumina base 1, and thin film electrodes 3 formed in the opposing inner surfaces of both are provided. The temp. compensating terminal 3' utilizing temp. coefft. of the dielectric factor of a glass seal part 4 for sealing the peripheral part of the diaphragm 2 and the base 1 is provided. |
