| 摘要 |
PURPOSE:To control the taking place of an error due to a secular change or the like with a simple construction by forming a recessed part at one place at least on a plate body and providing thin wall parts there and measuring the vibration frequency of the thin wall parts. CONSTITUTION:The plate body 21, the thin wall parts 27 and 28, and piezoelectric diaphragms 23, etc. are provided. Then, when the force (F) is given to the plate body 21, the vibrator (C) bends downward with an end on which the plate body 21 is fixed to a supporting body 22 as a center and the thin wall part 27 is drawn to compress the thin wall part 28. As this result, the vibration frequency of the thin wall 28 is changed and the force (F) can be measured based on this change. In this case, the diaphragm 23 at the thin wall part 27 and the diaphragm 23 at the thin wall 28 are changed with the contrary relation of increase and decrease of the frequency. Accordingly, the measurement can be performed with high sensitivity after an in-phase component is cancelled by actuating each couple of these diaphragms differentially. |
