| 摘要 |
PURPOSE:To obtain a protective layer having excellent adhesion and hardness by raising the temp. of a substrate. CONSTITUTION:When the temp. of a substrate in the heating stage is designated as T1, the substrate temp. in forming a ferromagnetic metallic film as T2 and the substrate temp. in forming a protective film as T3, the heating temps. in each stage are regulated to T1>=T2 T2. When T2S>T3, the adhesion of the protective layer is weakened and the adhesion is strengthened as T3 approches T2. Conversely, when T3>T2, distortion is generated between the protective film and the previously formed magnetic film and the peeling rate is increased. Accordingly, T2 and T3 are raised to a temp. as high as possible as long as the magnetic characteristic can be maintained and the temp. difference between both film is advantageously eliminated.
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