| 摘要 |
PURPOSE:To carry out simply the mounting of a substrate holder on a holder, by inserting a substrate holder holding part of a transfer rod holding the substrate holder between a junk ring and the holder body and closing the junk ring. CONSTITUTION:An opening and closing rod 48 is pressed in the direction of arrow (S3) to keep a junk ring 40 opened from the holder body 38, and a substrate holder holding part 52 of a transfer rod 14 is inserted between both with the substrate holder 50 held therewith to locate the substrate holder 50 at a given position. The opening and closing rod 48 is then moved in the direction of arrow (S4) to close the junk ring 40 by the force of a coil spring 46. The substrate holder 50 is nipped and fixed by the holder body 38 and junk ring 40. The transfer rod 14 is returned in the direction of arrow (S2) to complete the delivery of the substrate holder 50 from the substrate holder holding part 52 to a holder 37. In demounting the substrate holder 50, procedures are performed in the reverse direction.
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