| 摘要 |
A Positioning device having a plate-shaped carrier (5) which is slidably supported on a table (1) and is displaceable in a horizontal plane and on which a pressure force and a tensile force, respectively, are exerted by means of at least two translatory drives (11, 13). The translatory drives (11, 13) are coupled to the carrier (5) by means of horizontallyoperating static thrust and tensile bearings, respectively (33 to 41, 49) which via a viscous medium transmit pressure and tensile forces, respectively between the carrier (5) and the translator drives (11, 13) in a contactless manner. The contactless bearings (33 to 41, 49) are pre-stressed with a force which is larger than the maximum tensile force occurring between the drives (11, 13) and the carrier (5). Thus a substantially frictionless coupling is obtained between the drives (11, 13) and the carrier (5). This coupling acts at the same time as a guide for the carrier (5). |
