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发明名称
摘要
申请公布号
JPS61166533(U)
申请公布日期
1986.10.16
申请号
JP19850049748U
申请日期
1985.04.03
申请人
发明人
分类号
H01L21/56;(IPC1-7):H01L21/56
主分类号
H01L21/56
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代理人
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