发明名称 Polyamide-ester photoresist formulations of increased sensitivity
摘要 Photoresist formulations for forming relief structures from highly heat-resistant polyimide polymers containing in each case, in an organic solvent, essentially at least a) a polyamide-ester prepolymer carrying photopolymerisable radicals, b) a radiation-reactive copolymerisable unsaturated compound, c) a photosensitiser, d) a photoinitiator and e) a leuco dye, show an increased light sensitivity if they contain as photoinitiator a compound of the type of the N-azidosulphonylarylmaleimides and, as leuco dye, a compound of the type of the triarylmethanes.
申请公布号 DE3512544(A1) 申请公布日期 1986.10.16
申请号 DE19853512544 申请日期 1985.04.06
申请人 MERCK PATENT GMBH 发明人 MERREM,HANS-JOACHIM,DIPL.-CHEM.DR.;HEROLD,THOMAS,DIPL.-CHEM.DR.
分类号 G03F7/008;G03F7/037;G03F7/038;G03F7/105;(IPC1-7):G03C1/68;G03F7/26 主分类号 G03F7/008
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