| 摘要 |
PURPOSE:To produce recording media for magneto-optical storage elements in large quantities at high speed with high reproducibility when the recording media are produced by magnetron sputtering using a ferromagnetic plate target, by embedding a beltlike body of a desired material in the target at a prescribed position. CONSTITUTION:When a plate 5 of a ferromagnetic material such as Fe, Ni or Co is used as a target for sputtering in the production of photomagnetic recording media by magnetron sputtering, chips 6 or a beltlike body 8 of a rare earth element-transition metal alloy contg. at least one among Gd, Td, By and Cr is embedded in the target at a position where the target is acceleratedly consumed. The target is efficiently used without waste nd the sputtering efficiency is enhanced.
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