| 摘要 |
PURPOSE:To eliminate the need to specially provide a passage for cooling air and reduce the size of a main body, by a construction wherein a passage for cooling air provided in a space between arranged component parts such as circuit substrates is used also as a corner chamber in which a gas piping member is provided. CONSTITUTION:A portion of air sucked in through a suction port passes through the corner chamber 22, an opening in a partition plate 31 and a communicating hole 44 into the space 32, cools the circuit substrate 46, and passes through an exhaust hole 45 to be exhausted through a discharge hole 42 and gaps in exhaust cylinders 39, 40, 41. A main gas pipe 24 disposed vertically and branch pipes 28, 28, 28 connected thereto are contained in the corner chamber 22.
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