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发明名称
ALIGNMENT APPARATUS FOR MACHINES MAKING INTEGRATED CIRCUITS
摘要
申请公布号
EP0088691(B1)
申请公布日期
1986.10.15
申请号
EP19830400455
申请日期
1983.03.04
申请人
MATRA GCA S.A.
发明人
TIGREAT, PAUL;BERGER, LAURENT;HIGNETTE, OLIVIER
分类号
H01L21/30;G03F9/00;H01L21/027;H01L49/00;(IPC1-7):G03B41/00
主分类号
H01L21/30
代理机构
代理人
主权项
地址
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