| 摘要 |
The present invention relates to a carrier assembly (10; 110) comprising a drive ring (12; 112; 212) made of a hard material in which at least one aperture (16; 116) is formed for retaining a preferably removeable workpiece holder (18, 20, 22, 24, 26; 118; 218) made of softer material than the material used to make the drive ring. The workpiece holder contains a cavity which holds and retains the workpiece (28, 30, 32, 34, 36; 128, 130; 228, 230). The softer material of the workpiece holder protects and cushions the workpiece while the drive ring made of hard material withstands the forces generated during polishing, lapping and grinding operations. |
