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发明名称
PROCESS CHAMBER
摘要
申请公布号
SU1263528(A1)
申请公布日期
1986.10.15
申请号
SU19853882552
申请日期
1985.04.10
申请人
LE MEKHANICHESKIJ INSTITUT
发明人
GORBUNOV VLADIMIR A,SU
分类号
B25J21/00;B25J13/08;B25J19/00
主分类号
B25J21/00
代理机构
代理人
主权项
地址
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