发明名称 INSPECTING METHOD FOR DISLOCATION OF PATTERN
摘要 PURPOSE:To detect a shift from the prescribed point of an image by rotating relatively an object and a photographing means by the prescribed angle, obtaining the area of images obtained by dividing the image of one object into plural areas and comparing it with a reference one. CONSTITUTION:A certain displacement 7 is given to the rotating central spindle 6 of a rotating transporting device 4 turning clockwise by a rope L and the optical axis of a television camera 1, and the origin P0 of the coordinate axes (x, y) of the television camera 1 are equalized to the rotating central spindle 6. A square plate 12, for instance, as the object 3, is placed on the rotating transporting device 4. When the rotating transporting device 4 is rotated by 90 deg., for instance, the side of the square plate 12 has an angle of DELTAtheta with respect to the coordinate axes. If the center of the square plate 12 is shifted to the Px (DELTAx, DELTAy), graphics (a)-(d) can be obtained. An arithmetic processing circuit 2 obtains the areas Sa-Sd of the graphics (a)-(d). An equation, S=(Sa...+Sd)/4 is obtained, and the dislocation of the square plate 12 is obtained in accordance with the size of the difference between the areas Sa-Sd and the S. Thus the handy and simple device can obtain precisely dislocation.
申请公布号 JPS61230008(A) 申请公布日期 1986.10.14
申请号 JP19850070055 申请日期 1985.04.04
申请人 FUJI ELECTRIC CO LTD 发明人 NAITOU FUMIKADO
分类号 G01B11/00 主分类号 G01B11/00
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