| 摘要 |
<p>PURPOSE:To achieve efficient laser scanning by rotating a laser beam with the center of a semiconductor wafer being the center or rotation, and simultaneously displacing the laser beam radially of the semiconductor wafer. CONSTITUTION:A laser beam is rotated in the clockwise direction with the center of a semiconductor wafer l being the center of rotation,and simultaneously the laser beam is displaced radially from the outer periphery of the wafer 1 to the center thereof. Further, the laser beam is rotated in the counterclockwise direction with the center of the wafer 1 being the center of rotation, and simultaneously the laser beam is displaced radially from the center of the wafer 1 to the outer periphery thereof, thereby performing laser scanning. With this, uniform and efficient laser scanning can be performed on the whole surface of the wafer 1.</p> |
