| 摘要 |
PURPOSE:To detect the mirror face accuracy in a non-contact state by scanning the interior of a sphere while a counter is counting the time until when a pulse transmitted from a pulse laser oscillator generating a pulse signal is reflected by a subject to be tested and returns. CONSTITUTION:A horizontally rotating mechanism 8 is fitted on a base 2, and thereon a vertically rotating mechanism 7 is fitted. A pulse laser is transmitted from a transmitting part 9 fitted on the upper part of the vertically rotating mechanism 7, and a receiving part 9 receives the pulse laser which is reflected by the subject to be tested, an antenna 1, for instance, and returns. Then a built-in pulse counter counts the time from transmission to reception. A control ler not-shown in figure, rotates the sphere in all directions by the prescribed angle to scan the sphere, and length is obtained from the required time at each point. The obtained pole coordinate display is converted into three- dimensional coordinates, X, Y and Z. Thus the mirror face accuracy is detected in the non-contact state and the breakage of the surface due to malfunction can be prevented. |
