Stripping composition and method of using the same

摘要

Disclosed is a stripping composition for effectively removing an organic polymeric material from a substrate. The stripping composition is essentially free of phenol compounds and halogenated hydrocarbon compounds and contains a select amine compound and an organic polar solvent. It has been found that the stripping composition is highly effective, even when the organic polymeric material to be removed from a substrate is a positive resist which has been subjected to high temperature post-baking operations.