| 摘要 |
PURPOSE:To obtain an excellent vibration removal characteristic in a region from a low frequency, by applying to a vibration removing bed a vibration in a reverse phase to a resonance frequency component and damping the resonance frequency component. CONSTITUTION:A vibration detector 2, detecting a vibration on a vibration removing bed 1, monitors by its detection signal a vibrating condition through a vibration indicator 3. A resonance frequency component in the monitoring signal is picked up by a filter 4. The filter 4, generating an output approximating a single frequency component, monitors a phase of said output, and a correction signal is output from a phase correction circuit 5 so that a signal in a reverse phase out of 180 deg. to said phase is output from a transmitter 6. An output signal of the transmitter 6 is amplified by an amplifier 7, and the vibration removing bed 1, applying to its internally built-in vibrator 8 a vibration in a reverse phase to a resonance phenomenon by said amplified signal, enables a resonance magnification in the resonance point of air springs 9 to be low suppressed. |
