发明名称 THIN SILICON FILM AND PROCESS FOR PREPARING SAME
摘要
申请公布号 DE3175268(D1) 申请公布日期 1986.10.09
申请号 DE19813175268 申请日期 1981.10.15
申请人 THE STATE OF JAPAN, AS REPRESENTED BY THE DIRECTOR GENERAL OF THE AGENCY OF INDUSTRIAL SCIENCE AND TECHNOLOGY;TOA NENRYO KOGYO KABUSHIKI KAISHA 发明人 IIJIMA, SHIGERU ELECTR LAB, AGEN IND SCI & TECHN.;TANAKA, KAZUNOBU ELECTR LAB, AGEN IND SCI & TECHN.;MATSUDA, AKIHISA ELECTR LAB, AGEN IND SCI & TECHN.;MATSUMURA, MITSUO;YAMAMOTO, HIDEO
分类号 H01L21/205;H01L31/04;(IPC1-7):H01L21/205 主分类号 H01L21/205
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