| 摘要 |
PURPOSE:To make the constitution simple and low-cost by blocking one end of an integral monitor manifold with a conductor plate and leading a signal, which is reflected on this conductor plate, and a signal, which is transmitted directly to the other end of the integral monitor manifold, to a single detector to monitor these signals. CONSTITUTION:One end of an integral monitor manifold 10 is blocked with a conductor plate 42, and a detector 41 is provided in the other end of the integral monitor manifold 10. The signal transmitted toward the conductor plate 42 in the integral monitor manifold is reflected on the conductor plate 42 and is transmitted toward the detector 41 and is inputted to the detector 41. Meanwhile, the signal transmitted toward the detector 41 in the other end of the integral monitor manifold 10 from the first is inputted to the detector 41 as it is. Consequently, if relations of the beam scanning angle to the time are as shown in a figure (a), the signal inputted directly to the detector 41 and the signal reflected on the conductor plate 42 are inputted to the detector 41 as shown in a figure (b). |
