| 摘要 |
PURPOSE:To realize an effective use of metastable excited molecules, by performing a preferential reaction of non-thermally dissociative gases and metastable excited molecules in several reactive gases. CONSTITUTION:Reactive gases, leaking from the first reactive gas source 6 through a tube 13, react with metastable excited molecules (atoms) flowing through a tube 12, just before flowing into a reaction chamber 1 (near the branch point 11 of the tube). Resultantly, part of the reactive gases supplied from the first reactive gas source 6 flows into the reactive chamber 1 in a non-reactive state, and the greater part of them flows as reactive products of reactive gases. On the other hand, reactive gases leaking from the second reactive gas source 7 directly flow into the reactive chamber 1 through the valve 10, either react with metastable excited molecules (atoms), which flow into the reactive chamber 1 in a non-reactive state, of those molecules (atoms) generated at a generation part 5, or is decomposed by a heating effect of a heater 14, so that a thin film, containing both reactive gas components, is formed on the surface of the substrate 2. |
