发明名称 DISCHARGE REACTION DEVICE
摘要 PURPOSE:To obtain a surface treating apparatus having a sufficiently high treating speed and showing a high efficiency of utilization of gas by a construction wherein an electrode whereon a power for discharge is impressed is formed in the shape of a tube. CONSTITUTION:A magnetic field is impressed on an electrode 2 in the axial direction of the tube-shaped body thereof. When the magnetic field is impressed by using an air-core coil 4, the density of discharge in an internal space 13 is further increased, and consequently a much large quantity of active nitrogen or nitrogen ions than said introduced nitrogen gas, for instance, can be obtained. At the same time, plasma can be concentrated on the central portion of the internal space 13, which enables the reduction in the wear of a static conductive pipe 12 and the prevention of the surface of a substance 3' to be treated from the contamination due to the material of the electrode.
申请公布号 JPS61226925(A) 申请公布日期 1986.10.08
申请号 JP19850068780 申请日期 1985.04.01
申请人 ANELVA CORP 发明人 NAKAGAWA KOJIN;TAKAGI HIDEO
分类号 H01L21/205;C23F1/00;C23F4/00;H01L21/302;H01L21/31 主分类号 H01L21/205
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