| 摘要 |
PURPOSE:To miniaturize a device by mounting or dismantling a substrate by shifting a moving body horizontally and vertically. CONSTITUTION:A substrate 1 is carried up to a position on a groove section 10a formed to the left of a moving body 10, and stopped by a stopper 11. The moving body 10 upward shifts the substrate 1 up to a point Q along a path A and further transfers it to the right up to a point R along a path B, and the position of the moving body 10 under the state is shown in a dot-dash line. The moving body 10 is moved downward up to a point S along C, the substrate 1 placed on the groove section 10a is placed on a chuck 5 by the operation, and the substrate 1 takes a shape that it is floated from the moving body 10 under the state. The substrate 2 is loaded onto a conveyor 4, and carried out as it is, and lastly the moving body 10 is locomoted to the left up to a point P, an initial point, along a path D. Accordingly, both substrates can be stacked and held on the moving body, thus shortening the length of the moving body, then miniaturizing a device. |
