发明名称 |
FILM RESISTOR FOR FLOW MEASURING APPARATUS |
摘要 |
A film resistor for a flow measuring apparatus including: a substrate; a first insulating layer on the substrate; a platinum (Pt) pattern on the first insulating layer; and a second insulating layer on the platinum pattern. A titanium dioxide (TiO2) layer is provided between each of the first and second insulating layers and the platinum pattern. |
申请公布号 |
GB2173350(A) |
申请公布日期 |
1986.10.08 |
申请号 |
GB19860002489 |
申请日期 |
1986.01.31 |
申请人 |
* NIPPON SOKEN INC |
发明人 |
MINORU * OHTA;KAZUHIKO * MIURA;MICHITOSHI * ONODA;YUKIO * IWASAKI;TADASHI * HATTORI |
分类号 |
H01C7/00;G01F1/68;G01F1/692;H01C7/02;(IPC1-7):H01C7/00;C23C16/40 |
主分类号 |
H01C7/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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