发明名称 FILM RESISTOR FOR FLOW MEASURING APPARATUS
摘要 A film resistor for a flow measuring apparatus including: a substrate; a first insulating layer on the substrate; a platinum (Pt) pattern on the first insulating layer; and a second insulating layer on the platinum pattern. A titanium dioxide (TiO2) layer is provided between each of the first and second insulating layers and the platinum pattern.
申请公布号 GB2173350(A) 申请公布日期 1986.10.08
申请号 GB19860002489 申请日期 1986.01.31
申请人 * NIPPON SOKEN INC 发明人 MINORU * OHTA;KAZUHIKO * MIURA;MICHITOSHI * ONODA;YUKIO * IWASAKI;TADASHI * HATTORI
分类号 H01C7/00;G01F1/68;G01F1/692;H01C7/02;(IPC1-7):H01C7/00;C23C16/40 主分类号 H01C7/00
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