| 摘要 |
PURPOSE:To measure the surface temperature of solid material accurately with a better reproducibility, by detecting hourly changes in the intensity of electron reflected, diffracted or scattered on the surface of the solid material or the cycle of hourly changes in the absorption current flowing through the solid material. CONSTITUTION:An incident electron beam 11 from an electron gun 10 is reflected, diffracted or scattered on the surface of a substrate and the reflected electron beam and the diffracted electron beam obtained in a proper direction projects spot images on a fluorescent screen 12. These spot images are formed on an X-Y stage 14 with a camera or a lens 13 and one thereof is supplied to a photodetector 16 through an optical fiber 15 from the stage 14 to record the hourly changes in the output thereof by observing with a recorder 17. It is already discovered that the intensity of the specular spot in which the normal reflection highest in the intensity among those of the diffracted images is overlapped with the 0-order Laue point vibrates during the grow of crystal but the vibration thereof continues even after the growth is stopped. The relationship between the cycle of the vibration after the stoppage of the growth and the substrate temperature is memorized into a computer to be compared with the actually measured cycle, thereby enabling automatic measurement of temperature. |
