| 摘要 |
PURPOSE:To diffuse Zn at low concentration and in excellent reproducibility by a method wherein Zn3P2 and GaAsP or GaP are arranged in a sealed tube together with P or a P forming substance, and the vapor pressure of P in the tube is made 1X10<-5> Torr or higher before the pyrolysis of Zn3P2 is started. CONSTITUTION:When heating an ampul housing GaAs1-xPx, Zn2P3 and a P forming substance, the diffusion of Zn is advanced by the balance of P pressure based on the P forming substance, Zn pressure based on the decomposition of Zn2P3, P pressure and P pressure based on GaAs1-xPx. When P pressure in the ampul is previously set to 1X10<-5> Torr or higher before the decomposition of Zn2P3 is started, Zn2P3 does not evaporate even by the sudden heating of Zn2P3, the decomposition of the springing-out of P from GaAsP is prevented by P pressure, the roughness and cracks of the surface of GaAs1-xPx are reduced, Zn can be diffused in excellent controllability and reproducibility, and Zn and be diffused at low concentration because it is diffused in a gaseous phase balancing with a liquid phase in which P concentration is high and Zn concentration is low. |
