| 摘要 |
PURPOSE:To produce a coil of stabilized quality at low cost by performing scroll etching after compound superconductor thin film is formed on a normal conductive substrate. CONSTITUTION:A superconductive thin film B is formed on a surface of a normal conductive substrate A and a photosensitive resin C is applied on the thin film B. A scroll pattern D made of metal such as chromium etc. is placed on the upper section of the resin C and after ultraviolet ray is irradiated from the top and an exposure section is cured, eluation and elimination are performed to an unexposed section. After that, etching-treatment is performed and the exposed superconductive thin film is removed, irradiating laser beam and ion beam, thereafter a plate-state superconductive coil is obtained removing a resinous cure layer. The way things are going, a stabilized quality coil using compound superconductive substance, whose process is difficult, is obtained simply. |
