发明名称 SHAPE MEASURING COMPOSITE HEAD BY COMBINED APPLICATION OF LIGHT AND SUPERSONIC WAVE
摘要 PURPOSE:To construct a composite head without increasing a diameter, by providing a supersonic convertor with a light transmitting shape and mounting it on an extreme end of an optical head in perfect alignment of optical axis and supersonic wave propagating axis. CONSTITUTION:A supersonic wave is propagated from a supersonic wave convertor 4 to a specimen 3 and the reflected wave is received again by the convertor 4 and an analysis thereof is made by a supersonic wave controlling-processing apparatus 10 and at the same time, a beam light is irradiated from the extreme end of a composite head 1 onto the specimen 3 and the reflected beam is received by the head 1 for analysis by a light controlling-processing apparatus 11. In this case, light irradiation as well as receiving with respect to the specimen is performed by a light-transmitting convertor 4. And, as light axis and supersonic wave propagating axis are in alignment, simultaneous comparative observation of the same view field is available by supersonic wave and light and thus, observation can be done without alignment of both observation systems, regardless of distance from the specimen 3.
申请公布号 JPS61225611(A) 申请公布日期 1986.10.07
申请号 JP19850067426 申请日期 1985.03.29
申请人 AGENCY OF IND SCIENCE & TECHNOL 发明人 YAMANAKA ICHIJI
分类号 G01B17/00;G01B11/00;G01B11/24;G01B17/06;G01B21/00;G01N21/84;G01N29/24 主分类号 G01B17/00
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