发明名称 |
Precise movement device |
摘要 |
A precise movement device of the type for guiding a movable member with hydrostatic pressure or a magnetic field and moving the movable member substantially without a friction. The device includes a mechanism for supporting the movable member by the use of hydrostatic pressure or a magnetic field and for guiding the movement of the movable member, and includes a mechanism for generating a resistance against the movement of the movable member when the movable member is to be stopped, such that the movable member can be stopped at a desired position accurately and in a reduced time.
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申请公布号 |
US4615515(A) |
申请公布日期 |
1986.10.07 |
申请号 |
US19840681590 |
申请日期 |
1984.12.14 |
申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
SUZUTA, MIKIO;YAMAMOTO, HIRONORI;NAKAZAWA, KAZUO |
分类号 |
H01L21/30;B23Q1/26;B23Q1/28;G03F7/20;G03F9/00;G12B3/08;G12B5/00;H01L21/027;H01L21/67;H01L21/68;(IPC1-7):B25B1/22 |
主分类号 |
H01L21/30 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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