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发明名称
Method of forming isolation regions containing conductive patterns therein
摘要
申请公布号
US4615103(A)
申请公布日期
1986.10.07
申请号
US19850737922
申请日期
1985.05.28
申请人
TOKYO SHIBAURA DENKI KABUSHIKI KAISHA
发明人
KAMEYAMA, SHUICHI;SHINOZAKI, SATOSHI;IWAI, HIROSHI
分类号
H01L21/762;H01L21/763;(IPC1-7):H01L21/76;H01L21/88
主分类号
H01L21/762
代理机构
代理人
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