| 摘要 |
<p>PURPOSE:To enable highly accurate measurement, by compensating for measuring errors in a value to be inspected based on measuring error in the light loss of second and third optical fibers. CONSTITUTION:First and second light sources 1 and 16 are lighted alternately with a pulse driving circuit 19 and the light of the light source 1 is turned to two orthogonal polarized lights through a first optical fiber 2, a microlens 3, a polarizer 4, a modulation element 5, a halfmirror 22 and a photo detector element 6 to be introduced into second and third optical fibers 9 and 10. The lights introduced into both the optical fibers 9 and 10 are converted to electricity with first and second photo detectors 11 and 12 and undergoes an A/D conversion 20. On the other hand, the light of the light source 16 introduced onto one surface of the mirror 22 through a fourth optical fiber 17 is converted to electricity with the photo detectors 11 and 12 and undergoes an A/D conversion 20. Then, the difference in the light loss of the two optical fibers 9 and 10 which transmit the orthogonal polarized light of the light source 1 is computed 21 by the light of the light source 16 and the computation output of the value to be measured is compensated for by the difference. This enables highly accurate measurement of the value being measured.</p> |
