SOLAR CELL

摘要

PURPOSE:To obtain the solar cell having a good long wavelength sensitivity by using one of SiH4, Si2H6 and SiF4 and GeH4 or GeG4 for a material gas, CONSTITUTION:A substrate 3 is heated in a reaction tank 1 of a photochemical vapor deposition device and SiH4 is introduced 6. The air in the tank is.