发明名称 DISCHARGING DEVICE FOR FINE PARTIBLE IN FURNACE CORE TUBE
摘要 PURPOSE:To enable to discharge by suction fine particles located in a high temperature furnace core tube by amethod wherein a sucking device is connected to one end CONSTITUTION:A liquid nitrogen (refrigerant) intorducing hole 1a is provided at the upper part of a box type double cooling vessel 1 made of stainless steel, also a fin.
申请公布号 JPS61224412(A) 申请公布日期 1986.10.06
申请号 JP19850065912 申请日期 1985.03.29
申请人 TOSHIBA CORP 发明人 HAYAKAWA KENJI
分类号 H01L21/205;H01L21/22;H01L21/31 主分类号 H01L21/205
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