发明名称 POSITIONING FOR X-Y TABLE
摘要 PURPOSE:To contrive to improve the positioning operability of an X-Y table by a method wherein the moving amount of the X-Y table with the mounted substrate, whereon semiconductor device mounted sockets are regularly arranged alongside each other at a constant pitch in the X and Y directions, is set according to the pitch between sockets and the number of pieces of the sockets. CONSTITUTION:A substrate 7 is fixed on an X-Y table 6, the table 6 is made to shift and a unit 2 is inserted in a socket 4 in such a way that the socket 4 is conformed just under an inserting jig 1. Firstly, a socket S1 is made to shift just under an inserting jig 10 according to an X-direction first point moving amount (c) and a Y-direction first point moving amount (d). After the unit of the inserting jig 10 is inserted in the socket S1, the inserting jig 10 is made to shift to a socket S2 according to a Y-direction socket pitch (e) and when this operation is repeated by the number of times fewer one than the number of the sockets being arranged in the Y-direction (b), the operation is performed to a socket S4 and ends there. Then, the inserting jig 10 is made to shift to a socket S5 according to an X-direction socket pitch (f) and the operation is again performed to sockets S6-S8 according to the Y-direction socket pitch (e). When this operation is repeated the number of times fewer one than the number of the sockets being arranged in the X-direction (a), the insertion into all the sockets ends. According to this constitution, the total processing can be completed with only 6 information and the operability of the X-Y table is improved.
申请公布号 JPS61224338(A) 申请公布日期 1986.10.06
申请号 JP19850063544 申请日期 1985.03.29
申请人 HITACHI LTD 发明人 HIRAI YOSHIO;AJIKI NAOJI;TAKAMATSU ATSUYOSHI
分类号 B23P19/00;G05D3/00;H01L21/67;H01L21/68;H05K13/00 主分类号 B23P19/00
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