| 摘要 |
PURPOSE:To enable to clean up multiple works simultaneously with high precision by a method wherein, within a cleaning apparatus vacuum-attracting multiple small works mounted on a work holding base, medium with multiple notches to be engaged with the small works is mounted on the holding base while evacuating channels provided in the medium are communicated with the other vacuumizing channels of holding base one another. CONSTITUTION:Medium 11 to clean up multiple small works 13 is bonded on a work holding base not shown in figure to be vacuumized by a vacuum pump. This medium 11 composed of an upper plate 14, a high molecular plate 15 and a base plate 16 is provided with multiple notches 12 to be engaged with the small works 13. Besides, vacuumizing holes 17, 18 are made in the high molecular plate 15 and the base plate 16 exposed to the bottom of notches 12 so that the holes 17, 18 may be communicated with the vacuumizing channels of work holding base through the intermediary of grooves 19, 20. Through these procedures, the works 13 can be airtightly attracted to the medium 12 by elasticity of high molecular plate 15 to be cleaned up simultaneously. |
