发明名称 OUTPUT MEASURING METHOD
摘要 PURPOSE:To reduce the generation of heat of a power element and to measure an output power in a unit substrate state by fixing an object to be measured to a heat radiating part by vacuum attraction and operating the object to be measured with pulses. CONSTITUTION:The object 1 to be measured is attracted to the heat radiating part 2 by vacuum and an input part 6 is provided with a pulse gate 3 which inputs the power generated by an oscillator 4 to an input terminal 10 impulsively and the object 1 to be measured is operated only during the time of an optional pulse width interruptedly and the output peak power is read by a wattmeter 5. If the pulse width of the input signal is made shorter than the thermal time constant of the object 1 to be measured, the generation of heat in the object 1 to be measured is remarkably reduced compared with that in a continuous operation and the output power of the object 1 to be measured is measured only with heat radiation due to fixing to the heat radiating part 2 by vacuum attraction.
申请公布号 JPS61223668(A) 申请公布日期 1986.10.04
申请号 JP19850065330 申请日期 1985.03.29
申请人 NEC CORP 发明人 KAMIMURA KAZUYOSHI
分类号 G01R31/26;H01L21/66 主分类号 G01R31/26
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