| 摘要 |
PURPOSE:To enhance the in-plane orientation of an axis easy for magnetization even with use of an alloy thin film obtained by adding Ru to a Co-Ni alloy by composing the magnetic film of a Co-Ni alloy contg. Ru and regulating the ratio of the X-ray diffraction intensity I(002) of the (002) face to the X-ray diffraction intensity I(100) of the (100) face within the specified range. CONSTITUTION:A magnetic thin film layer to be formed on a substrate layer is composed of a Co-Ni alloy contg. 0.5-8atom% Ru and the ratio of the X-ray diffraction intensity I(002) of the (002) face to the X-ray diffraction intensity I(100) of the (100) face, namely I(002)/I(100) which is defined as R, is regulated to 0<=R<=3. Namely, an aluminum substrate or an aluminum alloy substrate is anodized in the liq. mixture contg. an acid such as chromic acid to form an alumite layer on the substrate surface. Then an Co-Ni-Ru thin film is formed on the substrate in an atmosphere contg. Gaseous Ar by sputtering, etc., and subsequently heat-treated to release N.
|
