| 摘要 |
PURPOSE:To obtain a carbon thin film having improved crystallizability, by feeding a hydrocarbon to a reaction system, and forming a carbon deposit on a crystal substrate by low-temperature thermal decomposition. CONSTITUTION:An argon gas is fed from the gas control system 2 to the valve container 1 in which a hydrocarbon such as benzene purified by vacuum distillation is put to bubble benzene, and benzene molecules are sent through the glass tube 3 to the reaction tube 4. On the other hand, an argon gas is made to flow the diluting line 6, and the density of the benzene molecules in the argon gas in the glass tube 3 just before being fed to the reaction tube 4 is made fittest. A growth substrate in the reaction tube 4 is kept at about 1,000 deg.C by the furnace 8. When the benzene molecules are fed to the reaction tube 4, they are thermally decomposed in the reaction tube, and carbon deposit having a metallic luster is formed on the growth substrate. An aromatic hydrocarbon or unsaturated hydrocarbon is preferable as the hydrocarbon used. |
