| 摘要 |
PURPOSE:To make the mixing of a gas in the inside of a cylinder uniform and to enable efficiently the formation and the activation of the fine particles by joining the semidivided cylindrical first electrode and the second electrode into a cylindrical shape via an insulating material and constituting a gas phase exciting device. CONSTITUTION:A gas phase exciting device 1 is constituted by sandwiching an insulating material 3 between the semidivided cylindrical first electrode 2a and the second electrode 2b. Furthermore the above-mentioned electrode 2a and the electrode 2b are connected with an electric power source 25 and the exciting device is constituted so that a carrier gas, and a gaseous raw material fed from one end of the device 1 are electrically discharged between the electrodes 2a, 2b. Since the carrier gas and the gaseous raw material are passed together through the pipe, the mixing of the gases can be fully performed in comparison with a conventional method. Also the formation and the activation of the fine particles can be effectively performed without dispersing unnecessarily the gases because the electrical discharge is performed in the inside of the pipe. |
