| 摘要 |
PURPOSE:To provide an optical recording material having high sensitivity and capable of high-density recording, by providing on a base a polycrystalline film comprising a terminator the optical reflectance or optical transmittance of which is changed by optical or thermal energy. CONSTITUTION:The base 1 is placed in a reaction vessel 2, and the temperature thereof is controlled by a heater 3. The vessel 2 is charged with disilane (Si2H6) through a gas inlet 4 and with hydrogen (H2) through a gas inlet 5. Light emitted from a light source 7 enters the vessel 2 through a window 8 to photolyzes disilane. By the photolysis, disilane is decomposed to Si, SiH, SiH2 or the like to be built up on the base 1 while mixing with H, H2 or the like. An a-Si:H film 15 thus built up on the base 1 is scanned by a scanner in vertical and horizontal directions, whereby serial information can be recorded on the film. |
