| 摘要 |
PURPOSE:To make a flow of the fine particles uniform and to enable the effective beam formation by providing the following reduction-expansion nozzle to a flow path wherein a couple of electrodes opposed with each other are provided in the inside surface and constituting a control device for the flow of a fine particle stream. CONSTITUTION:When a carrier gas dispersed and contained with a gaseous raw material is fed to the inside of an upstream chamber 3 and also the inside of a downstream chamber 4 is exhausted with a vacuum pump 5, the differential pressure is caused between the chambers 3, 4. Therefore the fed carrier gas is passed through a reduction-expansion nozzle 1 from the chamber 3 and flowed into the chamber 4. Since the nozzle 1 is provided with a couple of electrodes 9a, 9b opposed with each other in the inside surface, DC or the high frequency current is imparted between these electrodes and thereby the plasma discharge can be performed between both electrodes. Thereby the ultrafine particles forming treatment can be performed for the gaseous raw material bundled in the inside of the nozzle 1. |
