MINUTE PARTICLE FLOW CONTROL APPARATUS

摘要

PURPOSE:To control a beam spraying region by providing a skimmer with the function of a variable aperture on the downstream situated side of a shrinkage/expansion nozzle. CONSTITUTION:A passage is provided with a shrinkage/expansion nozzle 1 in which a passage is gradually shrinked from an inlet 1a toward a throat 2 and gradually expanded therefrom toward an outlet 1b. A skimmer 7 is provided on the downstream situated side of the shrinkage/expansion nozzle 1. This construction enables a surface irradiated by a beam to be controlled and a beam spraying region to be accurately controlled.