| 摘要 |
PURPOSE:To enable a carrier gas and a source gas to be uniformly mixed in a pipe by passing both the gases through an electrode composed of double pipes of a given length. CONSTITUTION:A barlike second electrode 9b is provided in a pipelike first electrode 9a. A carrier gas and a source gas are supplied into the first electrode 9a. A discharge is induced between the first and second electrodes 9a, 9b. A DC glow discharge or a high frequency glow discharge method is used as a gaseous phase excitation method usable in this case. Further, a perforated pipe is used as the second electrode 9b provided in the first electrode 9a and a carrier gas and a source gas are supplied into the first and second electrodes 9a and 9b, respectively. This construction secure a uniform mixture of the carrier gas and the source gas.
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