MINUTE PARTICLE FLOW CONTROL APPARATUS

摘要

PURPOSE:To supersonically transport minute particles in a spatially independent state by providing a passage with a shrinkage/expansion nozzle, homogenizing minute particle flow, and making the flow come into a beam. CONSTITUTION:A passage is provided with a shrinkage/expansion nozzle 1 in which a passage is gradually shrinked from an inlet 1a toward a throat 2 and gradually expanded therefrom toward an outlet 1b. A carrier gas in which minute particles are suspended and dispersed is supplied to an upstream chamber 3 and a downstream situated chamber 4 is exhausted by a vacuum pump 5. This construction enables the minute particles to come into a beam and a supersonic transport of the minute particles under a spatially independent state without an interference with the inner wall surface of the downstream situated chamber 4.